@phdthesis{8359,
  author = {F. M. Elam},
  title = {Atmospheric pressure-plasma enhanced chemical vapour deposition of silica. Characterisation and control of porosity in multi-layer encapsulation films},
  year = {2018},
  volume = {PhD},
  month = {2018/01/16},
  publisher = {Eindhoven University of Technology},
  address = {Eindhoven, Netherlands},
  isbn = {9789038644172},
  url = {https://research.tue.nl/nl/publications/atmospheric-pressure-plasma-enhanced-chemical-vapour-deposition-o},
  language = {eng},
}