Atomic layer deposition for nanostructured Li-ion batteries

TitleAtomic layer deposition for nanostructured Li-ion batteries
Publication TypeJournal Article
Year of Publication2012
AuthorsH.CM Knoops, M.E Donders, M.CM van de Sanden, P.HL Notten, W.MM Kessels
JournalJournal of Vacuum Science & Technology A
Volume30
Issue1
Pagination010801
Date PublishedJan
Type of ArticleReview
ISBN Number0734-2101
KeywordsANODE MATERIALS, CHALLENGES, CONVERSION, ELECTRODE MATERIALS, INTERCALATION, LITHIUM BATTERIES, REMOTE PLASMA ALD, SURFACE-CHEMISTRY, THIN-FILM, TIN
Abstract

Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1-100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3660699]

DOI10.1116/1.3660699
PID

842c14bd8f2ef68a716f5e0d179bca2b

Alternate TitleJ. Vac. Sci. Technol. A

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