Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings

TitleExtended theory of soft x-ray reflection for realistic lamellar multilayer gratings
Publication TypeJournal Article
Year of Publication2013
AuthorsR. van der Meer, I.V Kozhevnikov, H.MJ Bastiaens, K.J Boller, F. Bijkerk
JournalOptics Express
Volume21
Number11
Pagination13105-13117
Date PublishedJun
ISBN Number1094-4087
Abstract

An extended set of coupled wave equations were derived to describe non-idealized lamellar multilayer grating structures with properties as obtained with state-of-the-art fabrication techniques. These generalized equations can include all relevant effects describing the influence of passivation and contamination layers, non-rectangular lamel profiles and sidewall scalloping. The calculations showed that passivation and contamination plays an important role in that it may significantly reduce peak reflectivity. However, we also derived a condition for layer thicknesses having negligible effects. Slightly positive tapered lamel profiles are shown to further reduce the bandwidth as compared to a rectangular lamel profile, whereas negative tapers significantly increased the bandwidth. The influence of intriguing effects, such as the sidewall scalloping caused by Bosch Deep Reactive Ion Etching, are also modeled. We identified the signature of such scalloping as additional side peaks in the reflectivity spectrum and present parameters with which these can be effectively suppressed. (C) 2013 Optical Society of America

URLhttp://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-21-11-13105
DOI10.1364/oe.21.013105
Division

nSI

Department

AXO

PID

f7a10ef50e07e1997cb8c21fb0ba12ad

Alternate TitleOpt. Express
LabelOA

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