R.W.E. van de Kruijs

Nedelcu, I. ., van de Kruijs, R. ., Yakshin, A. E., von Blanckenhagen, G. ., & Bijkerk, F. . (2008). Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics. Optical Engineering, 47, 5. Retrieved from <Go to ISI>://000257884800009 (Original work published 2025)