R.W.E. van de Kruijs

Nedelcu, I., van de Kruijs, R., Yakshin, A. E., von Blanckenhagen, G., & Bijkerk, F. (2008). Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics. Optical Engineering, 47, 5. Retrieved from <Go to ISI>://000257884800009 (Original work published 2025)