On the synergistic effect of inorganic/inorganic barrier layers: An ellipsometric porosimetry investigation

TitleOn the synergistic effect of inorganic/inorganic barrier layers: An ellipsometric porosimetry investigation
Publication TypeJournal Article
Year of Publication2017
AuthorsM. Aghaee, A. Perrotta, S.A Starostin, H.W de Vries, M.CM van de Sanden, W.MM Kessels, M. Creatore
JournalPlasma Processes and Polymers
Volume14
Issue10
Pagination1700012
KeywordsEllipsometric porosimetry, gas permeation, moisture barrier layers, nano-porosity, plasma-assisted atomic layer deposition, plasma-enhanced chemical vapor deposition (PE-CVD)
Abstract

In this paper, plasma-enhanced chemical vapor deposited SiO2 layers capped by an ultra-thin plasma-assisted atomic layer deposited Al2O3 over-layer are analyzed by means of ellipsometric porosimetry (EP). In a very recent contribution, we have shown that the combination of the two layers provided excellent intrinsic moisture permeation barrier performance down to the 10−5–10−6 g · day−1 · m−2 regime. The present paper therefore addresses the microstructural changes which the SiO2 layers undergo upon Al2O3 deposition, as monitored by ellipsometric porosimetry (EP). It was found that the Al2O3 deposition primarily affects the relative content of open pores with d > 0.3 nm (water as probe) and d > 0.42 nm (ethanol as probe) from 5.35 to 2.81% and from 2.50 to 0.32%, respectively.

DOI10.1002/ppap.201700012
Division

MaSF

Department

APPFF

PID

f93f8fa72b51c97f9abf6ce411101742

Alternate TitlePlasma Processes Polym.

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