Atmospheric pressure-plasma enhanced chemical vapour deposition of silica. Characterisation and control of porosity in multi-layer encapsulation films

TitleAtmospheric pressure-plasma enhanced chemical vapour deposition of silica. Characterisation and control of porosity in multi-layer encapsulation films
Publication TypeThesis
Year of Publication2018
AuthorsF.M Elam
DegreePhD
Date Published2018/01/16
UniversityEindhoven University of Technology
CityEindhoven, Netherlands
Thesis TypePhD
ISBN Number9789038644172
URLhttp://repository.tue.nl/869991
Division

MaSF

Department

APPFF

PID

257ba3d08abaa18c590c02a8950131f7

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