Improving uniformity of atmospheric-pressure dielectric barrier discharges using dual frequency excitation

TitleImproving uniformity of atmospheric-pressure dielectric barrier discharges using dual frequency excitation
Publication TypeJournal Article
Year of Publication2018
AuthorsY. Liu, F.JJ Peeters, S.A Starostin, M.CM van de Sanden, H.W de Vries
JournalPlasma Sources Science and Technology
Volume27
Issue1
Pagination01LT01
Type of ArticleLetter
Abstract

This letter reports a novel approach to improve the uniformity of atmospheric-pressure dielectric barrier discharges using a dual-frequency excitation consisting of a low frequency (LF) at 200 kHz and a radio frequency (RF) at 13.56 MHz. It is shown that due to the periodic oscillation of the RF electric field, the electron acceleration and thus the gas ionization is temporally modulated, i.e. enhanced and suppressed during each RF cycle. As a result, the discharge development is slowed down with a lower amplitude and a longer duration of the LF discharge current. Hence, the RF electric field facilitates improved stability and uniformity simultaneously allowing a higher input power.

DOI10.1088/1361-6595/aaa568
Division

MaSF

Department

APPFF

PID6bf2b1447bcf5e95ec6182a05d9ab96b
Alternate TitlePlasma Sources Sci. Technol.
LabelOA
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