DIFFER PhD researcher Chidozie Onwudinanti will defend his thesis titled "On hydrogen penetration into ruthenium - The role of tin in blistering of EUV mirrors" on September 8th 2021 at 13h30.
Location
Public link: Deelnemen aan gesprek (microsoft.com)
Atlas 0.710, TU/e campus
Thesis
The reflectivity and operational lifetime of the ruthenium-capped multi-layer mirrors used in EUV lithography are reduced by the formation of blisters – hydrogen-filled bubbles under the ruthenium layer. These bubbles have been observed to form rapidly in the presence of tin, which may be deposited on the reflector surface from the laser-produced tin plasma in the EUV source. This dissertation proposes a mechanism via which tin facilitates the blistering of the mirrors, on the basis of atomistic modelling and simulation of ruthenium-hydrogen-tin interactions.
Committee
1e promotor: prof. dr. ir. J.M.V.A. Koelman
2e promotor: prof. dr. G.H.L.A. Brocks
co-promotor: dr. S.X. Tao
Research group: Plasma Material Interactions - Dutch Institute for Fundamental Energy Research (differ.nl)
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