Particle-in-cell/Monte Carlo simulation of radio frequency SiH4/H-2 discharges

TitleParticle-in-cell/Monte Carlo simulation of radio frequency SiH4/H-2 discharges
Publication TypeJournal Article
Year of Publication1999
AuthorsM. Yan, W.J Goedheer
JournalIeee Transactions on Plasma Science
Volume27
Number5
Pagination1399-1405
Date PublishedOct
ISBN Number0093-3813
Abstract

In this paper we report on a study of SiH4/H-2 radio-frequency discharges using the particle-in-cell/Monte Carlo (PIC/MC) method. A special procedure based on the rate balance for negative ions has been developed to speed up the simulation for this kind of electronegative discharge. The electron energy distribution function and the angular and energy distribution function of ions arriving at the substrate have been studied at different discharge settings (frequency, pressure, voltage, and power). The simulations show that the electrons are heated ohmically, so the average electron energy can be increased only by increasing the voltage, A high radical density, a high and more directional ion flux, and a low average ion energy can be obtained by a combination of a high frequency and a low RF voltage. The behavior of the dissociation rate with the discharge parameters is consistent with the experimentally observed consumption of SiH4. The simulated ion energy distribution functions are in good agreement with experimental results.

DOI10.1109/27.799818
PID

8ed3b4d2ea23aebced20c62927277fbc

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