Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers

TitleDetermination of crystallization as a function of Mo layer thickness in Mo/Si multilayers
Publication TypeJournal Article
Year of Publication2002
AuthorsS. Abdali, L. Gerward, A.E Yakshin, E. Louis, F. Bijkerk
JournalMaterials Research Bulletin
Volume37
Number2
Pagination279-289
Date PublishedFeb
ISBN Number0025-5408
Accession NumberISI:000175048300009
URL<Go to ISI>://000175048300009
Division

nSI

Department

TFN

PID

879eccccf07c618e9e2225e760d7aea0

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