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T. Krist, A. Teichert, E. Zoethout, F. Bijkerk, E. Meltchakov, V. Vidal, S. MuellenderStress Reduction in Multilayers Used for X-Ray and Neutron Optics, Modern Developments in X-Ray and Neutron Optics, Springer Series in Optical Sciences 137 (2008) 
S.M Wu, R. van de Kruijs, E. Zoethout, F. BijkerkSputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment, J. Appl. Phys. 5106 (2009) 6.
T. Tsarfati, E. Zoethout, R. van de Kruijs, F. BijkerkChemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces, J. Appl. Phys. 10105 (2009) 5.
T. Tsarfati, E. Zoethout, R. van de Kruijs, F. BijkerkIn-depth agglomeration of d-metals at Si-on-Mo interfaces, J. Appl. Phys. 6105 (2009) 5.
T. Tsarfati, R de Kruijs, E. Zoethout, E. Louis, F. BijkerkReflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography, Thin Solid Films 5518 (2009) 1365-1368.
J. Rapp, G.J van Rooij, A. Litnovsky, L. Marot, G. De Temmerman, J. Westerhout, E. ZoethoutTemperature effect on hydrocarbon deposition on molybdenum mirrors under ITER-relevant long-term plasma operation, Phys. Scr. T138 (2009) 4.
T. Tsarfati, E. Zoethout, R.WE van de Kruijs, F. BijkerkAtomic O and H exposure of C-covered and oxidized d-metal surfaces, Surf. Sci. 16603 (2009) 2594-2599.
T. Tsarfati, E. Zoethout, R. van de Kruijs, F. BijkerkGrowth and sacrificial oxidation of transition metal nanolayers, Surf. Sci. 7603 (2009) 1041-1045.
T. Tsarfati, R.WE van de Kruijs, E. Zoethout, E. Louis, F. BijkerkNitridation and contrast of B4C/La interfaces and X-ray multilayer optics, Thin Solid Films 24518 (2010) 7249-7252.
V de Rooij-Lohmann, L.W Veldhuizen, E. Zoethout, A.E Yakshin, R.WE van de Kruijs, B.J Thijsse, M. Gorgoi, F. Schafers, F. BijkerkChemical interaction of B4C, B, and C with Mo/Si layered structures, J. Appl. Phys. 9108 (2010) 6.
A.E Yakshin, I.V Kozhevnikov, E. Zoethout, E. Louis, F. BijkerkProperties of broadband depth-graded multilayer mirrors for EUV optical systems, Opt. Express 718 (2010) 6957-6971.
A.JR van den Boogaard, E. Louis, E. Zoethout, S. Mullender, F. BijkerkSurface morphology of Kr+-polished amorphous Si layers, J. Vac. Sci. Technol. A 428 (2010) 552-558.
V de Rooij-Lohmann, A.E Yakshin, R.WE van de Kruijs, E. Zoethout, A.W Kleyn, E.G Keim, M. Gorgoi, F. Schafers, H.H Brongersma, F. BijkerkEnhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems, J. Appl. Phys. 1108 (2010) 5.
G.M Wright, R.S. Al, E. Alves, L.C Alves, N.P Barradas, A.W Kleyn, N.JL Cardozo, H.J van der Meiden, V. Philipps, G.J van Rooij et al.Carbon film growth and hydrogenic retention of tungsten exposed to carbon-seeded high density deuterium plasmas, J. Nucl. Mater. 2-3396 (2010) 176-180.
S. Bruijn, R.WE van de Kruijs, A.E Yakshin, E. Zoethout, F. BijkerkThermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures, Surf. Coat. Technol. 7205 (2010) 2469-2473.