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A. Perrotta, G. Aresta, E.RJ van Beekum, J. Palmans, P. van de Weijer, M.CM van de Sanden, W.MM Kessels, M. CreatoreThe impact of the nano-pore filling on the performance of organosilicon-based moisture barriers, Thin Solid Films 595, Part B (2015) 251-257.
T. Zaharia, P. Kudlacek, M. Creatore, R. Groenen, P. Persoone, M.CM van de SandenImproved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films, Diam. Relat. Mat. 20 (2011) 1266-1272.
M.V Ponomarev, K. Sharma, M.A Verheijen, M.CM van de Sanden, M. CreatoreImproved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer, J. Appl. Phys. 111 (2012) 063715.
K. Sharma, M.A Verheijen, M.CM van de Sanden, M. CreatoreIn situ crystallization kinetics studies of plasma-deposited, hydrogenated amorphous silicon layers, J. Appl. Phys. 111 (2012) 6.
G. Aresta, J. Palmans, M.CM van de Sanden, M. CreatoreInitiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition, J. Vac. Sci. Technol. A 30 (2012) 11.
F.JH van Assche, S. Unnikrishnan, J.J Michels, A.MB van Mol, P. van de Weijer, M.CM van de Sanden, M. CreatoreOn the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers, Thin Solid Films 558 (2014) 54-61.
A.C Bronneberg, N. Cankoy, M.CM van de Sanden, M. CreatoreIon-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films, J. Vac. Sci. Technol. A 630 (2012) 061512.

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