Publications

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Author Title Type [ Year(Desc)]
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2012
M.V Ponomarev, M.A Verheijen, W. Keuning, M.CM van de Sanden, M. CreatoreControlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (vol 112, 043708, 2012), J. Appl. Phys. 6112 (2012) 1.
K. Sharma, M.V Ponomarev, M.A Verheijen, O. Kunz, F.D Tichelaar, M.CM van de Sanden, M. CreatoreSolid-phase crystallization of ultra high growth rate amorphous silicon films, J. Appl. Phys. 111 (2012) 5.
G. Aresta, J. Palmans, M.CM van de Sanden, M. CreatoreEvidence of the filling of nano-porosity in SiO2-like layers by an initiated-CVD monomer, Microporous Mesoporous Mat. 151 (2012) 434-439.
M.V Ponomarev, K. Sharma, M.A Verheijen, M.CM van de Sanden, M. CreatoreImproved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer, J. Appl. Phys. 111 (2012) 063715.
F. Law, B. Hoex, J. Wang, J. Luther, K. Sharma, M. Creatore, M.CM van de SandenKinetic study of solid phase crystallisation of expanding thermal plasma deposited a-Si:H, Thin Solid Films 520 (2012) 5820-5825.
G. Aresta, J. Palmans, M.CM van de Sanden, M. CreatoreInitiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition, J. Vac. Sci. Technol. A 30 (2012) 11.
A.C Bronneberg, M.CM van de Sanden, M. CreatoreRemote plasma deposition of microcrystalline silicon thin-films: Film structure and the role of atomic hydrogen, J. Non-Cryst. Solids 358 (2012) 379-386.
K. Sharma, M.A Verheijen, M.CM van de Sanden, M. CreatoreIn situ crystallization kinetics studies of plasma-deposited, hydrogenated amorphous silicon layers, J. Appl. Phys. 111 (2012) 6.
M.V Ponomarev, M.A Verheijen, W. Keuning, M.CM van de Sanden, M. CreatoreControlling the resistivity gradient in chemical vapor deposition-deposited aluminum-doped zinc oxide, J. Appl. Phys. 112 (2012) 04370.
H.T Beyene, J.W Weber, M.A Verheijen, M.CM van de Sanden, M. CreatoreReal time in situ spectroscopic ellipsometry of the growth and plasmonic properties of au nanoparticles on SiO2, Nano Res. 5 (2012) 513-520.
A.C Bronneberg, N. Cankoy, M.CM van de Sanden, M. CreatoreIon-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films, J. Vac. Sci. Technol. A 630 (2012) 061512.
P.A Premkumar, S.A Starostin, H. de Vries, M. Creatore, P.M Koenraad, W.A MacDonald, M.CM van de SandenSurface Dynamics of SiO2-like Films on Polymers Grown by DBD Assisted CVD at Atmospheric Pressure, Plasma Processes Polym. 11-129 (2012) 1194–1207.

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