Publications
Enhanced Reflectivity of Soft-X-Ray Multilayer Mirrors by Reduction of Si Atomic Density, Applied Physics Letters 2463 (1993) 3297-3299.
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Soft-X-Ray Projection Lithography Using a High-Repetition-Rate Laser-Induced X-Ray Source for Sub-100 Nanometer Lithography Processes, Microelectronic Engineering 1-421 (1993) 67-70.
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Modification by Ar and Kr Ion-Bombardment of Mo/Si X-Ray Multilayers, Applied Surface Science 278 (1994) 147-157.
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Enhancement of Reflectivity of Multilayer Mirrors for Soft-X-Ray Projection Lithography by Temperature Optimization and Ion-Bombardment, Microelectronic Engineering 1-423 (1994) 215-218.
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