Publications

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2002
N. Koster, B. Mertens, R. Jansen, A. van de Runstraat, F. Stietz, M. Wedowski, H. Meiling, R. Klein, A. Gottwald, F. Scholze et al.Molecular contamination mitigation in EUVL by environmental control, Microelectron. Eng. 61-2 (2002) 65-76.
R. Stuik, F. Scholze, J. Tummler, F. BijkerkAbsolute calibration of a multilayer-based XUV diagnostic, Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 1-2492 (2002) 305-316.