Export 3 results:
Author Title Type [ Year(Asc)]
Filters: Author is Scholze, F.  [Clear All Filters]
N. Koster, B. Mertens, R. Jansen, A. van de Runstraat, F. Stietz, M. Wedowski, H. Meiling, R. Klein, A. Gottwald, F. Scholze et al.Molecular contamination mitigation in EUVL by environmental control, Microelectron. Eng. 61-2 (2002) 65-76.
R. Stuik, F. Scholze, J. Tummler, F. BijkerkAbsolute calibration of a multilayer-based XUV diagnostic, Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 1-2492 (2002) 305-316.