Publications
Enhancement of Reflectivity of Multilayer Mirrors for Soft-X-Ray Projection Lithography by Temperature Optimization and Ion-Bombardment, Microelectronic Engineering 1-423 (1994) 215-218.
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Laser-Plasma Sources for Soft-X-Ray Projection Lithography, Journal De Physique Iii 94 (1994) 1669-1677.
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Measuring one-dimensional and two-dimensional impurity density profiles on TEXTOR using combined charge exchange-beam emission spectroscopy and ultrasoft x-ray tomography, Review of Scientific Instruments 1075 (2004) 4155-4157.
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New diagnostics for physics studies on TEXTOR-94 (invited), Review of Scientific Instruments 172 (2001) 1046-1053.
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Pilot experiments for the International Thermonuclear Experimental Reactor active beam spectroscopy diagnostic, Review of Scientific Instruments 1075 (2004) 3458-3461.
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Soft-X-Ray Projection Lithography Using a High-Repetition-Rate Laser-Induced X-Ray Source for Sub-100 Nanometer Lithography Processes, Microelectronic Engineering 1-421 (1993) 67-70.
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