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E. L. G. Maas

First name
E.
Middle name
L. G.
Last name
Maas
Stuik, R., Louis, E., Yakshin, A. E., Gorts, P. C., Maas, E. L. G., Bijkerk, F., … Haidl, M. (1999). Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography. Journal of Vacuum Science & Technology B, 17, 2998-3002. https://doi.org/10.1116/1.590942 (Original work published 1999)
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