R. Klein

Mertens, B., Weiss, M., Meiling, H., Klein, R., Louis, E., Kurt, R., … van de Kruijs, R. (2004). Progress in EUV optics lifetime expectations. Microelectronic Engineering, 73-74, 16-22. Retrieved from <Go to ISI>://000222145400005 (Original work published 2025)

Koster, N., Mertens, B., Jansen, R., van de Runstraat, A., Stietz, F., Wedowski, M., … Yakshin, A. (2002). Molecular contamination mitigation in EUVL by environmental control. Microelectronic Engineering, 61-2, 65-76. Retrieved from <Go to ISI>://000176594700009 (Original work published 2025)