Liu, Y. ., Elam, F. M., Zoethout, E. ., Starostin, S. A., van de Sanden, M. C. M., & de Vries, H. W. (2019). Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation. Journal of Physics D: Applied Physics, 52(35), 355201. https://doi.org/10.1088/1361-6463/ab269b (Original work published 2019)
DIFFER