Mertens, B. ., Weiss, M. ., Meiling, H. ., Klein, R. ., Louis, E. ., Kurt, R. ., … van de Kruijs, R. . (2004). Progress in EUV optics lifetime expectations. Microelectronic Engineering, 73-74, 16-22. Retrieved from <Go to ISI>://000222145400005 (Original work published 2025)
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