Chen, J. Q., Louis, E., Lee, C. J., Wormeester, H., Kunze, R., Schmidt, H., … Bijkerk, F. (2009). Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express, 17, 16969-16979. Retrieved from <Go to ISI>://000269736100067 (Original work published 2025)
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