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Chen, J. Q., Louis, E. ., Lee, C. J., Wormeester, H. ., Kunze, R. ., Schmidt, H. ., … Bijkerk, F. . (2009). Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express, 17, 16969-16979. Retrieved from <Go to ISI>://000269736100067 (Original work published 2024)

Chen, J. Q., Lee, C. J., Louis, E. ., Bijkerk, F. ., Kunze, R. ., Schmidt, H. ., … Moors, R. . (2009). Characterization of EUV induced carbon films using laser-generated surface acoustic waves. Elsevier Science Sa. Retrieved from <Go to ISI>://000267737000017