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Verkerk, A. D., de Jong, M. M., Rath, J., Brinza, M., Schropp, R. E. I., Goedheer, W. J., … Smirnov, A. S. (2009). Compensation of decreased ion energy by increased hydrogen dilution in plasma deposition of thin film silicon solar cells at low substrate temperatures. Elsevier Science Bv. Retrieved from <Go to ISI>://000267635500014