C . Y. Deng

Zhao, C. L., . Y. Deng, C., Sun, W. Z., Zhang, J. Y., Chen, F., He, P. N., … Gou, F. J. (2012). Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology, 14(7), 670-674. https://doi.org/10.1088/1009-0630/14/7/23 (Original work published 2025)

Lu, X. D., Qin, Y., Ning, J., Zhou, T., . Y. Deng, C., Meng, C., … Ming, J. (2009). Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500068

Lu, X., Qin, Y., Ning, J., Zhou, T., . Y. Deng, C., Meng, C., … Gou, F. (2009). Molecular dynamics simulations of CH+ ions interaction with silicon carbide. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500069