C . Y. Deng

Zhao, C. L., . Y. Deng, C. ., Sun, W. Z., Zhang, J. Y. ., Chen, F. ., He, P. N., … Gou, F. J. (2012). Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology, 14(7), 670-674. https://doi.org/10.1088/1009-0630/14/7/23 (Original work published 2024)

Lu, X. D., Qin, Y. ., Ning, J. ., Zhou, T. ., . Y. Deng, C. ., Meng, C. ., … Ming, J. . (2009). Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500068

Lu, X. ., Qin, Y. ., Ning, J. ., Zhou, T. ., . Y. Deng, C. ., Meng, C. ., … Gou, F. . (2009). Molecular dynamics simulations of CH+ ions interaction with silicon carbide. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500069