Dingemans, G. ., Terlinden, N. M., Verheijen, M. A., van de Sanden, M. C. M., & Kessels, W. M. M. (2011). Controlling the fixed charge and passivation properties of Si(100)/Al(2)O(3) interfaces using ultrathin SiO(2) interlayers synthesized by atomic layer deposition. Journal of Applied Physics, 110(9), 6. https://doi.org/10.1063/1.3658246 (Original work published 2025)
DIFFER