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W. Z. Sun

First name
W.
Middle name
Z.
Last name
Sun
Zhao, C. L., . Y. Deng, C. ., Sun, W. Z., Zhang, J. Y. ., Chen, F. ., He, P. N., … Gou, F. J. (2012). Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology, 14(7), 670-674. https://doi.org/10.1088/1009-0630/14/7/23 (Original work published 2025)
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