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Zhao, C. ., Lu, X. ., He, P. ., Zhang, P. ., Sun, W. ., Zhang, J. ., … Gou, F. . (2012). CF3+ etching silicon surface: A molecular dynamics study. Vacuum, 86(7), 913-916. https://doi.org/10.1016/j.vacuum.2011.06.003 (Original work published 2025)

Zhao, C. L., . Y. Deng, C. ., Sun, W. Z., Zhang, J. Y. ., Chen, F. ., He, P. N., … Gou, F. J. (2012). Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology, 14(7), 670-674. https://doi.org/10.1088/1009-0630/14/7/23 (Original work published 2025)