Zhao, C., Lu, X., He, P., Zhang, P., Sun, W., Zhang, J., … Gou, F. (2012). CF3+ etching silicon surface: A molecular dynamics study. Vacuum, 86(7), 913-916. https://doi.org/10.1016/j.vacuum.2011.06.003 (Original work published 2025)
DIFFER
F. Chen
First name
F.
Last name
Chen
Zhao, C. L., . Y. Deng, C., Sun, W. Z., Zhang, J. Y., Chen, F., He, P. N., … Gou, F. J. (2012). Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology, 14(7), 670-674. https://doi.org/10.1088/1009-0630/14/7/23 (Original work published 2025)