R. Desor

Bijkerk, F., Shmaenok, L., Vanhonk, A., Bastiaensen, R., . Y. Platonov, Y., Shevelko, A. P., … Nikolaus, B. (1994). Laser-Plasma Sources for Soft-X-Ray Projection Lithography. Journal De Physique Iii, 4, 1669-1677. https://doi.org/10.1051/jp3:1994232 (Original work published 2025)

Louis, E., Bijkerk, F., Shmaenok, L., Voorma, H. J., van der Wiel, M. J., Schlatmann, R., … Nikolaus, B. (1993). Soft-X-Ray Projection Lithography Using a High-Repetition-Rate Laser-Induced X-Ray Source for Sub-100 Nanometer Lithography Processes. Microelectronic Engineering, 21, 67-70. https://doi.org/10.1016/0167-9317(93)90028-4 (Original work published 2025)