F. J. H. van Assche

van Assche, F. J. H., Unnikrishnan, S. ., Michels, J. J., van Mol, A. M. B., van de Weijer, P. ., van de Sanden, M. C. M., & Creatore, M. . (2014). On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers. Thin Solid Films, 558(2 May 2014), 54-61. https://doi.org/http://dx.doi.org/10.1016/j.tsf.2014.02.069