DIFFER

A. M. B. van Mol

First name
A.
Middle name
M. B.
Last name
van Mol
van Assche, F. J. H., Unnikrishnan, S. ., Michels, J. J., van Mol, A. M. B., van de Weijer, P. ., van de Sanden, M. C. M., & Creatore, M. . (2014). On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers. Thin Solid Films, 558(2 May 2014), 54-61. https://doi.org/http://dx.doi.org/10.1016/j.tsf.2014.02.069