DIFFER

A. Kovalev

First name
A.
Last name
Kovalev
Dolgov, A., Lopaev, D., Rachimova, T., Kovalev, A., Vasil’Eva, A., Lee, C. J., … Bijkerk, F. (2014). Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas. Journal of Physics D: Applied Physics, 47(6), 065205. https://doi.org/10.1088/0022-3727/47/6/065205