O. Yakushev

Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O., & Bijkerk, F. (2015). Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source. Applied Surface Science, 353, 708-713. https://doi.org/10.1016/j.apsusc.2015.06.079 (Original work published)

Dolgov, A., Lopaev, D., Rachimova, T., Kovalev, A., Vasil’Eva, A., Lee, C. J., … Bijkerk, F. (2014). Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas. Journal of Physics D: Applied Physics, 47(6), 065205. https://doi.org/10.1088/0022-3727/47/6/065205