Bijkerk, F. ., Shmaenok, L. ., Vanhonk, A. ., Bastiaensen, R. ., . Y. Platonov, Y. ., Shevelko, A. P., … Nikolaus, B. . (1994). Laser-Plasma Sources for Soft-X-Ray Projection Lithography. Journal De Physique Iii, 4, 1669-1677. https://doi.org/10.1051/jp3:1994232 (Original work published 2024)
DIFFER