Landheer, K., Goedheer, W. J., Poulios, I., Schropp, R. E. I., & Rath, J. K. (2016). Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2 discharge in the a-Si:H to μc-Si:H transition regime. Physica Status Solidi A - Applications and Materials Science, 213(7), 1680–1685. https://doi.org/10.1002/pssa.201532917
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