Nienhuis, G. J., & Goedheer, W. . (1999). Modelling of a large scale reactor for plasma deposition of silicon. Plasma Sources Science & Technology, 8, 295-298. https://doi.org/10.1088/0963-0252/8/2/310 (Original work published 2025)
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G. J. Nienhuis
First name
G.
Middle name
J.
Last name
Nienhuis
Nienhuis, G. J., Goedheer, W. J., Hamers, E. A. G., van Sark, W. ., & Bezemer, J. . (1997). A self-consistent fluid model for radio-frequency discharges in SiH4-H-2 compared to experiments. Journal of Applied Physics, 82, 2060-2071. https://doi.org/10.1063/1.366016 (Original work published)