DIFFER
DIFFER Publication
The Bohm Criterion for Rf Discharges
| Author | |
| Abstract |
The well-known dc Bohm criterion is extended to rf discharges. Both low- (omega-rf |
| Year of Publication |
1991
|
| Journal |
Physics of Fluids B-Plasma Physics
|
| Volume |
3
|
| Number |
8
|
| Number of Pages |
1804-1806
|
| Date Published |
Aug
|
| ISBN Number |
0899-8221
|
| DOI |
10.1063/1.859649
|
| PId |
ab0bfa7ba3505173155329bddc739e3a
|
Journal Article
|
|
| Download citation |