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The Bohm Criterion for Rf Discharges
| Label | Value |
|---|---|
| Author | |
| Abstract |
The well-known dc Bohm criterion is extended to rf discharges. Both low- (omega-rf |
| Year of Publication |
1991
|
| Journal |
Physics of Fluids B-Plasma Physics
|
| Volume |
3
|
| Number |
8
|
| Number of Pages |
1804-1806
|
| Date Published |
08/1991
|
| ISBN Number |
0899-8221
|
| DOI | |
| PId |
ab0bfa7ba3505173155329bddc739e3a
|
Journal Article
|
|
| Download citation |
Citation
Meijer, P. M., & Goedheer, W. J. (1991). The Bohm Criterion for Rf Discharges. Physics of Fluids B-Plasma Physics, 3, 1804-1806. https://doi.org/10.1063/1.859649 (Original work published 1991)