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Relaxation Phenomena after Laser-Induced Photodetachment in Electronegative Rf Discharges

Author
Abstract

The response of a radio-frequency discharge in an electronegative gas to laser-induced photodetachment is considered. The discharge is described by a numerical fluid model, including the electron energy balance. The detachment event is simulated by transforming instantaneously all or part of the negative ions into electrons in the region of the discharge passed by the laser beam. In order to avoid severe restrictions on the computational time step, the evolution of the electron density and of the electric field is solved with a fully implicit numerical method. It turns out that the relaxation towards the periodic quasisteady state is mainly governed by a simultaneous increase of the production rate of negative ions and decrease of the ionization rate. The qualitative behavior of the calculated electron decay rate is in accordance with experimental observations.

Year of Publication
1993
Journal
Journal of Applied Physics
Volume
73
Number
3
Number of Pages
1073-1079
Date Published
Feb 1
ISBN Number
0021-8979
DOI
10.1063/1.353294
PId
8374ae807882a37130730a76a3cbd988
Journal Article
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