Comparison between a radio-frequency and direct current glow discharge in argon by a hybrid Monte Carlo-fluid model for electrons, argon ions and fast argon atoms

A hybrid Monte Carlo-fluid model has been developed for the electrons, argon ions and fast argon atoms in an argon glow discharge, either operated in the de mode or the capacitively coupled rf mode. Typical working conditions for rf GD-OES are considered, i.e. approximately 6 torr argon gas pressure and approximately 10 W power. Typical results of the model, like the potential distributions, densities, fluxes and ionization rates, will be presented and compared between the two operation modes. It will be demonstrated that the rf discharge yields more efficient ionization than the de discharge, and hence the rf discharge requires lower voltages to obtain the same amount of power, which is in good correspondence to experimental observations. (C) 1999 Elsevier Science B.V. All rights reserved.