DIFFER
DIFFER Publication
Numerical investigation of particle formation mechanisms in silane discharges
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2004
|
| Journal |
Physical Review E
|
| Volume |
69
|
| Number |
5
|
| Date Published |
05/2004
|
| ISBN Number |
1063-651X
|
| Accession Number |
ISI:000221813400085
|
| URL | |
| PId |
a65f58707466be6156ff576a58cbe005
|
Journal Article
|
|
| Download citation |
Citation
De Bleecker, K., Bogaerts, A., Gijbels, R., & Goedheer, W. (2004). Numerical investigation of particle formation mechanisms in silane discharges. Physical Review E, 69. Retrieved from <Go to ISI>://000221813400085 (Original work published 2004)