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Energy partitioning in N-2 microwave discharges: integrated Fokker-Planck approach to vibrational kinetics and comparison with experiments

Author
Abstract

This work investigates energy transfers between electrons, vibrational and translational degrees of freedom and their effect on dissociation mechanisms in a N2 microwave plasma in the pressure range between 50 and 400 mbar. A novel self-consistent 0D plasma chemistry model describing vibrational kinetics via the vibrational energy equation and the Fokker-Planck approach is developed. It is used to simulate conditions achieved experimentally, providing good agreement with measured values of vibrational and gas temperature and electron density. Above 100 mbar, energy efficiency of dissociation increases with power density, due to the significant contribution of collisions between vibrationally excited N2 and electronically excited molecules. Energy transfer to vibrations is maximum at low power density and low pressure due to reduced gas heating.

Year of Publication
2022
Journal
Plasma Sources Science and Technology
Volume
31
Issue
10
Number of Pages
104003
DOI
10.1088/1361-6595/ac93af
PId
87704700d8aa6bf7fdd5623a686b0a1d
Alternate Journal
Plasma Sources Sci. Technol.
Label
OA
Journal Article
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