|Title||Analytic theory of soft x-ray diffraction by lamellar multilayer gratings|
|Publication Type||Journal Article|
|Year of Publication||2011|
|Authors||I.V Kozhevnikov, R. van der Meer, H.MJ Bastiaens, K.J Boller, F. Bijkerk|
|Type of Article||Article|
An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed. (C) 2011 Optical Society of America
|Alternate Title||Opt. Express|
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