Analytic theory of soft x-ray diffraction by lamellar multilayer gratings

TitleAnalytic theory of soft x-ray diffraction by lamellar multilayer gratings
Publication TypeJournal Article
Year of Publication2011
AuthorsI.V Kozhevnikov, R. van der Meer, H.MJ Bastiaens, K.J Boller, F. Bijkerk
JournalOptics Express
Volume19
Issue10
Number10
Pagination9172-9184
Date PublishedMay
Type of ArticleArticle
ISBN Number1094-4087
Abstract

An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed. (C) 2011 Optical Society of America

DOI10.1364/OE.19.009172
Division

nSI

PID

242c84a0d5181a86999fd03f19f8ba5b

Alternate TitleOpt. Express
LabelOA

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