Ellipsometry with randomly varying polarization states

TitleEllipsometry with randomly varying polarization states
Publication TypeJournal Article
Year of Publication2012
AuthorsF. Liu, C.J Lee, J.Q Chen, E. Louis, P.JM van der Slot, K.J Boller, F. Bijkerk
JournalOptics Express
Volume20
Issue2
Pagination870-878
Date PublishedJan
Type of ArticleArticle
ISBN Number1094-4087
KeywordsFIBER, films
Abstract

We show that, under the right conditions, one can make highly accurate polarization-based measurements without knowing the absolute polarization state of the probing light field. It is shown that light, passed through a randomly varying birefringent material has a well-defined orbit on the Poincar sphere, which we term a generalized polarization state, that is preserved. Changes to the generalized polarization state can then be used in place of the absolute polarization states that make up the generalized state, to measure the change in polarization due to a sample under investigation. We illustrate the usefulness of this analysis approach by demonstrating fiber-based ellipsometry, where the polarization state of the probe light is unknown, and, yet, the ellipsometric angles of the investigated sample (psi and Delta) are obtained with an accuracy comparable to that of conventional ellipsometry instruments by measuring changes to the generalized polarization state. (C) 2012 Optical Society of America

DOI10.1364/OE.20.000870
Division

nSI

Department

EUV-Lab

PID

a02b374b36686a6f6b058359da4089dc

Alternate TitleOpt. Express
LabelOA

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