RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation (vol 11, 021112, 2012)

TitleRZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation (vol 11, 021112, 2012)
Publication TypeJournal Article
Year of Publication2012
AuthorsK.N Koshelev, V.V Ivanov, V.G Novikov, V. Medvedev, A.S Grushin, V.M Krivtsun
JournalJournal of Micro-Nanolithography Mems and Moems
Volume11
Issue2
Pagination029802
Date PublishedApr-Jun
Type of ArticleCorrection
ISBN Number1932-5150
DOI10.1117/1.JMM.11.2.029802
Division

nSI

Department

TFM

PID

cf745ab973714c7de7cf01f0e9ace3d2

Alternate TitleJ. Micro-Nanolithogr. MEMS MOEMS
LabelOA

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