| Title | Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors |
| Publication Type | Journal Article |
| Year of Publication | 2012 |
| Authors | V.V Medvedev, A.E Yakshin, R.WE van de Kruijs, V.M Krivtsun, A.M Yakunin, K.N Koshelev, F. Bijkerk |
| Journal | Optics Letters |
| Volume | 37 |
| Issue | 7 |
| Pagination | 1169-1171 |
| Date Published | Apr |
| Type of Article | Article |
| ISBN Number | 0146-9592 |
| Keywords | CONSTANTS, mirrors |
| Abstract | An extreme ultraviolet multilayer mirror with an integrated spectral filter for the IR range is presented and experimentally evaluated. The system consists of an IR-transparent B4C/Si multilayer stack which is used both as EUV-reflective coating and as a phase shift layer of the resonant IR antireflective (AR) coating. The AR coating is optimized in our particular case to suppress CO2 laser radiation at a wavelength of 10.6 mu m, and a suppression of more than two orders of magnitude is demonstrated. The method allows high suppression over a large angular acceptance range, relevant for application in lithography systems. (C) 2012 Optical Society of America |
| DOI | 10.1364/OL.37.001169 |
| Division | nSI |
| Department | TFM |
| PID | 52a9f1edb0aaa9a9d277b1e1e569e365 |
| Alternate Title | Opt. Lett. |
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