Title | Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | V.V Medvedev, A.JR van den Boogaard, R. van der Meer, A.E Yakshin, E. Louis, V.M Krivtsun, F. Bijkerk |
Journal | Optics Express |
Volume | 21 |
Number | 14 |
Pagination | 16964-16974 |
Date Published | Jul |
ISBN Number | 1094-4087 |
Abstract | We report on the development of a hybrid mirror realized by integrating an EUV-reflecting multilayer coating with a lamellar grating substrate. This hybrid mirror acts as an efficient Bragg reflector for extreme ultraviolet (EUV) radiation at a given wavelength while simultaneously providing spectral-selective suppression of the specular reflectance for unwanted longer-wavelength radiation due to the grating phase-shift resonance. The test structures, designed to suppress infrared (IR) radiation, were fabricated by masked deposition of a Si grating substrate followed by coating of the grating with a Mo/Si multilayer. To give the proof of principle, we developed such a hybrid mirror for the specific case of reflecting 13.5 nm radiation while suppressing 10 mu m light, resulting in 61% reflectance at the wavelength of 13.5 nm together with the 70 x suppression rate of the specular reflection at the wavelength of 10 mu m, but the considered filtering principle can be used for a variety of applications that are based on utilization of broadband radiation sources. (C) 2013 Optical Society of America |
DOI | 10.1364/oe.21.016964 |
Division | nSI |
Department | TFM |
PID | cec1c843517604e9ec84320ff5ec7b37 |
Alternate Title | Opt. Express |
Label | OA |
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