Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors

TitleInfrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors
Publication TypeJournal Article
Year of Publication2013
AuthorsV.V Medvedev, A.JR van den Boogaard, R. van der Meer, A.E Yakshin, E. Louis, V.M Krivtsun, F. Bijkerk
JournalOptics Express
Volume21
Number14
Pagination16964-16974
Date PublishedJul
ISBN Number1094-4087
Abstract

We report on the development of a hybrid mirror realized by integrating an EUV-reflecting multilayer coating with a lamellar grating substrate. This hybrid mirror acts as an efficient Bragg reflector for extreme ultraviolet (EUV) radiation at a given wavelength while simultaneously providing spectral-selective suppression of the specular reflectance for unwanted longer-wavelength radiation due to the grating phase-shift resonance. The test structures, designed to suppress infrared (IR) radiation, were fabricated by masked deposition of a Si grating substrate followed by coating of the grating with a Mo/Si multilayer. To give the proof of principle, we developed such a hybrid mirror for the specific case of reflecting 13.5 nm radiation while suppressing 10 mu m light, resulting in 61% reflectance at the wavelength of 13.5 nm together with the 70 x suppression rate of the specular reflection at the wavelength of 10 mu m, but the considered filtering principle can be used for a variety of applications that are based on utilization of broadband radiation sources. (C) 2013 Optical Society of America

DOI10.1364/oe.21.016964
Division

nSI

Department

TFM

PID

cec1c843517604e9ec84320ff5ec7b37

Alternate TitleOpt. Express
LabelOA

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