Interlayer growth in Mo/B4C multilayered structures upon thermal annealing

TitleInterlayer growth in Mo/B4C multilayered structures upon thermal annealing
Publication TypeJournal Article
Year of Publication2013
AuthorsS.L Nyabero, R.WE van de Kruijs, A.E Yakshin, E. Zoethout, G. von Blanckenhagen, J. Bosgra, R.A Loch, F. Bijkerk
JournalJournal of Applied Physics
Volume113
Issue14
Pagination144310
KeywordsAnnealing, Auger electron spectra, boron compounds, densification, molybdenum, multilayers, stress relaxation, X-ray diffraction, X-ray reflection
URLhttp://link.aip.org/link/?JAP/113/144310/1
DOI10.1063/1.4800910
Division

nSI

Department

TFM

PID

a57e21cd63ce86be2fbbe0ad336166d2

Alternate TitleJ. Appl. Phys.

Go back one page.