The Bohm Criterion for Rf Discharges

TitleThe Bohm Criterion for Rf Discharges
Publication TypeJournal Article
Year of Publication1991
AuthorsP.M Meijer, W.J Goedheer
JournalPhysics of Fluids B-Plasma Physics
Volume3
Number8
Pagination1804-1806
Date PublishedAug
ISBN Number0899-8221
Abstract

The well-known dc Bohm criterion is extended to rf discharges. Both low- (omega-rf

DOI10.1063/1.859649
PID

ab0bfa7ba3505173155329bddc739e3a

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