High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths

TitleHigh efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths
Publication TypeJournal Article
Year of Publication2014
AuthorsQ. Huang, M. de Boer, J. Barreaux, R. van der Meer, E. Louis, F. Bijkerk
JournalOptics Express
Volume22
Issue16
Pagination19365-19374
Date PublishedAug
KeywordsDiffraction gratings, extreme ultraviolet (EUV), Interference coatings, Soft x-rays, X-rays
Abstract

High spectral purity at longer wavelength side is demanded in many extreme ultraviolet (EUV) and soft X-ray (together also referred to as XUV) optical systems. It is usually obtained at the expense of a high loss of XUV efficiency. We proposed and developed a new method based on a periodic, tapered structure integrated with an EUV multilayer. The longer wavelength radiation is scattered/diffracted away by the tapered multilayer structure while the EUV light is reflected. The first proof-of-principle showed a broadband suppression from &\#x03BB; $=$ 100-400 nm with an average factor of 14. Moreover, a high EUV reflectance of 64.7% was achieved, which corresponds to 94% of the efficiency of a regular EUV multilayer mirror.

DOI10.1364/OE.22.019365
Division

nSI

PID

62056edc50717063a8874c7608d546cb

Alternate TitleOpt. Express
LabelOA

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