|Title||High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths|
|Publication Type||Journal Article|
|Year of Publication||2014|
|Authors||Q. Huang, M. de Boer, J. Barreaux, R. van der Meer, E. Louis, F. Bijkerk|
|Keywords||Diffraction gratings, extreme ultraviolet (EUV), Interference coatings, Soft x-rays, X-rays|
High spectral purity at longer wavelength side is demanded in many extreme ultraviolet (EUV) and soft X-ray (together also referred to as XUV) optical systems. It is usually obtained at the expense of a high loss of XUV efficiency. We proposed and developed a new method based on a periodic, tapered structure integrated with an EUV multilayer. The longer wavelength radiation is scattered/diffracted away by the tapered multilayer structure while the EUV light is reflected. The first proof-of-principle showed a broadband suppression from &\#x03BB; $=$ 100-400 nm with an average factor of 14. Moreover, a high EUV reflectance of 64.7% was achieved, which corresponds to 94% of the efficiency of a regular EUV multilayer mirror.
|Alternate Title||Opt. Express|
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