Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

TitleCapacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry
Publication TypeJournal Article
Year of Publication2016
AuthorsB. Bruneau, P. Diomede, D.J Economou, S. Longo, T. Gans, D. O’Connell, A. Greb, E. Johnson, J.P Booth
JournalPlasma Sources Science and Technology
Volume25
Issue4
Pagination045019
Abstract

Parallel plate capacitively coupled plasmas in hydrogen at relatively high pressure ( 1 Torr) are excited with tailored voltage waveforms containing up to five frequencies. Predictions of a hybrid model combining a particle-in-cell simulation with Monte Carlo collisions and a fluid model are compared to phase resolved optical emission spectroscopy measurements, yielding information on the dynamics of the excitation rate in these discharges. When the discharge is excited with amplitude asymmetric waveforms, the discharge becomes electrically asymmetric, with different ion energies at each of the two electrodes. Unexpectedly, large differences in the H2+ fluxes to each of the two electrodes are caused by the different H3+ energies. When the discharge is excited with slope asymmetric waveforms, only weak electrical asymmetry of the discharge is observed. In this case, electron power absorption due to fast sheath expansion at one electrode is balanced by electron power absorption at the opposite electrode due to a strong electric field reversal.

DOI10.1088/0963-0252/25/4/045019
Division

FP

Department

CPPC

PID

688bf9808be2898dc7e7c522492ef9dc

Alternate TitlePlasma Sources Sci. Technol.
LabelOA

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