|Title||Role of Electron–Ion Dissociative Recombination in CH4 Microwave Plasma on Basis of Simulations and Measurements of Electron Energy|
|Publication Type||Journal Article|
|Year of Publication||2019|
|Authors||T. Minea, A.W van de Steeg, A.J Wolf, A.S da Silva, F.JJ Peeters, D.CM van den Bekerom, T. Butterworth, Q. Ong, M.CM van de Sanden, G.J van Rooij|
|Journal||Plasma Chemistry and Plasma Processing|
C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019 m−3 (10 −6 to 10 −4 ionization degree) and the electron mean energy
|Alternate Title||Plasma Chem. Plasma Process.|
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