Role of Electron–Ion Dissociative Recombination in CH4 Microwave Plasma on Basis of Simulations and Measurements of Electron Energy

TitleRole of Electron–Ion Dissociative Recombination in CH4 Microwave Plasma on Basis of Simulations and Measurements of Electron Energy
Publication TypeJournal Article
Year of Publication2019
AuthorsT. Minea, A.W van de Steeg, A.J Wolf, A.S da Silva, F.JJ Peeters, D.CM van den Bekerom, T. Butterworth, Q. Ong, M.CM van de Sanden, G.J van Rooij
JournalPlasma Chemistry and Plasma Processing
Volume39
Issue5
Pagination1275–1289
Date Published09/2019
Abstract

C–H bond activation was studied in low pressure microwave plasma discharges in methane. Electron energy loss channels were analyzed in view of promoting vibrational excitation. The molecular dissociative recombination (DR) channel is concluded to play multiple roles in the hydrocarbon plasma chemistry. DR increases the electron temperature with input power density and simultaneously breaks the hydrocarbon chains. Depending on the ionic species considered, plasma density n e in the range of 1017-1019 m−3 (10 −6 to 10 −4 ionization degree) and the electron mean energy in the range of 2−4 eV were estimated on basis of a Boltzman solver. from 2−3 eV measured with Thomson scattering anchored the microwave discharges in a preferential regime for vibrational excitation. The best agreement with experiments was obtained when C+ is the dominant ion in the CH4 microwave plasma, formed through successive DR and charge exchange reactions from molecular ions.

DOI10.1007/s11090-019-10005-w
Division

MaSF

Department

NFC

PID

2dd9145406f2faccfb3794b79d1e5f25

Alternate TitlePlasma Chem. Plasma Process.

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